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class="newsTime">time：2024-03-14 16:15:54</span> </div> <div id="6eqb8tr3fa" class="newsSummary">半導體激光器是用半導體材料作為工作介質(zhì)的激光器。在各類(lèi)激光器中，半導體激光器擁有最佳的能量轉化效率（直接應用的高功率半導體激光元器件的電光轉換效率最高可達到60-70%），可以作為光纖激光器、固體激光器等多種光泵浦激光器的核心泵浦源使用，并推動(dòng)光纖激光及固體激光技術(shù)的迅速發(fā)展。</div> <div id="6eqb8tr3fa" class="newsContent"> <div id="6eqb8tr3fa" class="newsContent-in"> <h1 class="rich_media_title " id="activity-name"><span style="font-size: 13px;font-family: 宋體;visibility: visible"> 半導體激光器是用半導體材料作為工作介質(zhì)的激光器。在各類(lèi)激光器中，半導體激光器擁有最佳的能量轉化效率（直接應用的高功率半導體激光元器件的電光轉換效率最高可達到</span><span style="font-size: 13px;font-family: Times;visibility: visible">60-70%</span><span style="font-size: 13px;font-family: 宋體;visibility: visible">），可以作為光纖激光器、固體激光器等多種光泵浦激光器的核心泵浦源使用，并推動(dòng)光纖激光及固體激光技術(shù)的迅速發(fā)展。</span></h1><p style="visibility: visible"><span style="font-size: 13px;font-family: 宋體;visibility: visible">一、半導體激光器分類(lèi)</span></p><p style="visibility: visible"><span style="font-size: 13px;font-family: 宋體;visibility: visible">半導體激光器又稱(chēng)為激光二極管，是采用半導體材料作為工作介質(zhì)而產(chǎn)生受激發(fā)射的一類(lèi)激光器。常用材料有砷化鎵（</span><span style="font-size: 13px;font-family: Times;visibility: visible">GaAs</span><span style="font-size: 13px;font-family: 宋體;visibility: visible">）、硫化鎘（</span><span style="font-size: 13px;font-family: Times;visibility: visible">CdS</span><span style="font-size: 13px;font-family: 宋體;visibility: visible">）、磷化銦（</span><span style="font-size: 13px;font-family: Times;visibility: visible">InP</span><span style="font-size: 13px;font-family: 宋體;visibility: visible">）、硫化鋅（</span><span style="font-size: 13px;font-family: Times;visibility: visible">ZnS</span><span style="font-size: 13px;font-family: 宋體;visibility: visible">）。激勵方式有電注入、電子束激勵和光泵浦激勵三種形式。</span></p><p style="visibility: visible"><span style="font-size: 13px;font-family: 宋體;visibility: visible">根據激光介質(zhì)和工作原理的不同，半導體激光器可以分為以下幾類(lèi)：</span></p><p style="visibility: visible"><span style="font-size: 13px;font-family: Times;visibility: visible">1.</span><span style="font-size: 13px;font-family: 宋體;visibility: visible">激光二極管</span></p><p style="visibility: visible"><span style="font-size: 13px;font-family: 宋體;visibility: visible">激光二極管的工作原理是，在</span><span style="font-size: 13px;font-family: Times;visibility: visible">PN</span><span style="font-size: 13px;font-family: 宋體;visibility: visible">結中注入電流，電子與空穴在結區域內復合，釋放出激光光子。由于</span><span style="font-size: 13px;font-family: Times;visibility: visible">PN</span><span style="font-size: 13px;font-family: 宋體;visibility: visible">結的結區域非常小，因此可以產(chǎn)生非常密集的激光束。激光二極管的波長(cháng)通常在</span><span style="font-size: 13px;font-family: Times;visibility: visible">800nm</span><span style="font-size: 13px;font-family: 宋體;visibility: visible">至</span><span style="font-size: 13px;font-family: Times;visibility: visible">980nm</span><span style="font-size: 13px;font-family: 宋體;visibility: visible">之間，適合于光纖通信等應用。</span></p><p style="visibility: visible"><span style="font-size: 13px;font-family: Times;visibility: visible">2.</span><span style="font-size: 13px;font-family: 宋體;visibility: visible">垂直腔面發(fā)射激光器</span><span style="font-size: 13px;font-family: Times;visibility: visible">(VCSEL)</span></p><p style="visibility: visible"><span style="font-size: 13px;font-family: 宋體;visibility: visible">垂直腔面發(fā)射激光器</span><span style="font-size: 13px;font-family: Times;visibility: visible">(VCSEL)</span><span style="font-size: 13px;font-family: 宋體;visibility: visible">是一種在半導體芯片上制造的激光器。它的激光輸出垂直于芯片表面，可以實(shí)現高效耦合到光纖或其他光學(xué)元件中，因此在光通信、光存儲、光打印等領(lǐng)域有廣泛應用。</span></p><p style="visibility: visible"><span style="font-size: 13px;font-family: Times;visibility: visible">3.</span><span style="font-size: 13px;font-family: 宋體;visibility: visible">邊界發(fā)射激光器</span><span style="font-size: 13px;font-family: Times;visibility: visible">(EEL)</span></p><p style="visibility: visible"><span style="font-size: 13px;font-family: 宋體;visibility: visible">邊界發(fā)射激光器</span><span style="font-size: 13px;font-family: Times;visibility: visible">(EEL)</span><span style="font-size: 13px;font-family: 宋體;visibility: visible">是一種在</span><span style="font-size: 13px;font-family: Times;visibility: visible">PN</span><span style="font-size: 13px;font-family: 宋體;visibility: visible">結的邊界上發(fā)射激光的半導體激光器。它的結構類(lèi)似于激光二極管，但是在</span><span style="font-size: 13px;font-family: Times;visibility: visible">PN</span><span style="font-size: 13px;font-family: 宋體;visibility: visible">結的一側增加了一層反射鏡，使激光在</span><span style="font-size: 13px;font-family: Times;visibility: visible">PN</span><span style="font-size: 13px;font-family: 宋體;visibility: visible">結邊界上振蕩，</span><span style="font-size: 13px;font-family: Times;visibility: visible">EEL</span><span style="font-size: 13px;font-family: 宋體;visibility: visible">的優(yōu)點(diǎn)是輸出功率高，波長(cháng)可調，結構簡(jiǎn)單等。</span></p><p><span style="font-size:13px;font-family:Times">4.</span><span style="font-size:13px;font-family:宋體">量子阱激光器</span></p><p><span style="font-size:13px;font-family:宋體">量子阱激光器是一種利用量子阱結構的電子束純效應產(chǎn)生激光的半導體激光器。量子阱激光器且有波長(cháng)可調，輸出功率高，照聲低等優(yōu)點(diǎn)，適用于光纖通信，醫療和光譜分析等領(lǐng)域。</span></p><p><span style="font-size:13px;font-family:Times">5.</span><span style="font-size:13px;font-family:宋體">垂直外延激光器</span></p><p><span style="font-size:13px;font-family:宋體">垂直外延激光器</span><span style="font-size:13px;font-family:Times">(VLEC)</span><span style="font-size:13px;font-family: 宋體">是一種采用外延生長(cháng)技術(shù)制造的半導體激光器。</span><span style="font-size:13px;font-family:Times">VIEC</span><span style="font-size:13px;font-family: 宋體">的結構復雜，制造工藝難度較大，但是具有波長(cháng)范圍寬，輸出功率高等優(yōu)點(diǎn)，適用于高速光通信，光存儲和光打印等領(lǐng)域。</span></p><p><span style="font-size:13px;font-family:Times">VSCEL VS EEL</span></p><p><span style="font-size:13px;font-family:宋體">根據激光投影的方向，半導體激光器可以分為兩類(lèi)型：邊發(fā)射激光器（</span><span style="font-size:13px;font-family:Times">EEL</span><span style="font-size:13px;font-family:宋體">）和垂直腔面發(fā)射激光器（</span><span style="font-size: 13px;font-family:Times">VCSEL</span><span style="font-size:13px;font-family:宋體">）。</span></p><p><span style="font-size:13px;font-family:Times">EEL</span><span style="font-size:13px;font-family:宋體">有兩種主要類(lèi)型：</span><span style="font-size:13px;font-family:Times">FP</span><span style="font-size:13px;font-family:宋體">激光器和</span><span style="font-size:13px;font-family:Times">DFB</span><span style="font-size:13px;font-family:宋體">激光器。在</span><span style="font-size:13px;font-family:Times">FP</span><span style="font-size:13px;font-family:宋體">激光器中，激光二極管是激光器，其反射鏡只是激光芯片末端的平面裂開(kāi)表面。</span><span style="font-size:13px;font-family:Times">FP</span><span style="font-size:13px;font-family:宋體">激光器主要用于低數據速率短距離傳輸；傳輸距離一般在</span><span style="font-size:13px;font-family:Times">20km</span><span style="font-size:13px;font-family: 宋體">以?xún)?，速率一般?/span><span style="font-size:13px;font-family:Times">1.25G</span><span style="font-size:13px;font-family:宋體">以?xún)取?/span><span style="font-size:13px;font-family:Times">DFB</span><span style="font-size:13px;font-family:宋體">激光二極管是在腔內具有光柵結構的激光器，其在整個(gè)腔中產(chǎn)生多次反射。它們主要用于高數據速率的長(cháng)距離傳輸。</span></p><p><span style="font-size:13px;font-family:Times">VCSEL</span><span style="font-size:13px;font-family: 宋體">與</span><span style="font-size:13px;font-family:Times">EEL</span><span style="font-size:13px;font-family:宋體">相比，</span><span style="font-size:13px;font-family:Times">VCSEL</span><span style="font-size:13px;font-family: 宋體">激光垂直于頂面射出，與激光由邊緣射出的邊發(fā)射型激光器（</span><span style="font-size:13px;font-family:Times">EEL</span><span style="font-size:13px;font-family:宋體">）有所不同。因此相較于邊射型激光器，</span><span style="font-size:13px;font-family:Times">VCSEL</span><span style="font-size:13px;font-family: 宋體">激光器具有低閾值電流、穩定單波長(cháng)工作、可高頻調制、容易二維集成、沒(méi)有腔面閾值損傷等優(yōu)點(diǎn)，提供更好的激光束質(zhì)量，更高的耦合效率和空腔反射率。此外，</span><span style="font-size:13px;font-family:Times">VCSEL</span><span style="font-size:13px;font-family: 宋體">能夠以二維陣列進(jìn)行，使單個(gè)芯片可以包含數百個(gè)單獨的光源，以增加最大輸出功率和提升長(cháng)遠的可靠性，</span><span style="font-size:13px;font-family:Times">EEL</span><span style="font-size:13px;font-family:宋體">只能在簡(jiǎn)單的一維陣列中進(jìn)行。</span></p><p><span style="font-size:13px;font-family:Times">1</span><span style="font-size:13px;font-family:宋體">）垂直腔面發(fā)射激光器</span><span style="font-size:13px;font-family:Times">(VCSEL)</span></p><p><span style="font-size:13px;font-family:Times">VCSEL(Vertical Cavity Surface Emitting Laser)</span><span style="font-size:13px;font-family:宋體">是一種主要以砷化鎵半導體材料為基礎研制的垂直表面出光的新型激光器，基本結構是由上下兩個(gè)</span><span style="font-size:13px;font-family:Times">DBR</span><span style="font-size:13px;font-family:宋體">（</span><span style="font-size:13px;font-family:Times">Distributed Bragg Reflector</span><span style="font-size:13px;font-family:宋體">）反射鏡和有源區這三部分組成。</span><span style="font-size:13px;font-family: Times">VCSEL</span><span style="font-size:13px;font-family:宋體">具有體積小、圓形輸出光斑、單縱模輸出、閾值電流小、價(jià)格低廉、易集成為大面積陣列等優(yōu)點(diǎn)。</span></p><p><span style="font-size:13px;font-family:宋體">在應用領(lǐng)域方面，</span><span style="font-size:13px;font-family:Times">VCSEL</span><span style="font-size:13px;font-family: 宋體">從誕生起就作為新一代光存儲和光通信應用的核心器件，應用在光并行處理、光識別、光互聯(lián)系統、光存儲等領(lǐng)域。隨著(zhù)工藝、材料技術(shù)改進(jìn)，</span><span style="font-size:13px;font-family:Times">VCSEL</span><span style="font-size:13px;font-family: 宋體">器件在功耗、制造成本、集成、散熱等領(lǐng)域的優(yōu)勢開(kāi)始顯現，逐漸應用于包括消費電子、工業(yè)、醫療、</span><span style="font-size:13px;font-family:Times">5G</span><span style="font-size:13px;font-family:宋體">、汽車(chē)電子、</span><span style="font-size:13px;font-family:Times">AR/VR</span><span style="font-size:13px;font-family:宋體">等領(lǐng)域。</span></p><p><span style="font-size:13px;font-family:Times">VCSEL</span><span style="font-size:13px;font-family: 宋體">芯片的封裝方式比較多樣。常見(jiàn)的</span><span style="font-size: 13px;font-family:Times">VCSEL</span><span style="font-size:13px;font-family:宋體">芯片封裝包括：金屬</span><span style="font-size:13px;font-family:Times">TR</span><span style="font-size:13px;font-family:宋體">組件封裝、塑料</span><span style="font-size:13px;font-family:Times">TR</span><span style="font-size:13px;font-family:宋體">組件封裝以及陶瓷</span><span style="font-size:13px;font-family:Times">TD</span><span style="font-size:13px;font-family:宋體">組件封裝等。其中，</span><span style="font-size:13px;font-family:Times">TR</span><span style="font-size:13px;font-family:宋體">組件指</span><span style="font-size:13px;font-family:Times">VCSEL</span><span style="font-size:13px;font-family:宋體">激光器芯片與信號轉換接口板（或器件）分開(kāi)進(jìn)行封裝，可以實(shí)現對光纖的直連；</span><span style="font-size:13px;font-family:Times">TD</span><span style="font-size:13px;font-family:宋體">組件指采用有引腳的陶瓷基板封裝，可以直接和</span><span style="font-size:13px;font-family:Times">PCB</span><span style="font-size:13px;font-family:宋體">板焊接。</span></p><p><span style="font-size:13px;font-family:Times">2</span><span style="font-size:13px;font-family:宋體">）邊發(fā)射激光器（</span><span style="font-size:13px;font-family:Times">EEL</span><span style="font-size:13px;font-family:宋體">）</span></p><p><span style="font-size:13px;font-family:Times">EEL</span><span style="font-size:13px;font-family:宋體">激光器是一種速度快、高效能、低能耗和小型化的固態(tài)激光器。</span><span style="font-size:13px;font-family:Times">EEL</span><span style="font-size:13px;font-family:宋體">激光器的原理是利用電子注入來(lái)實(shí)現放電反轉。</span><span style="font-size:13px;font-family:Times">EEL</span><span style="font-size:13px;font-family:宋體">激光器有法布里珀羅</span><span style="font-size:13px;font-family:Times">(FP)</span><span style="font-size:13px;font-family:宋體">、分布式布拉格反射器</span><span style="font-size:13px;font-family: Times">(DBRs)</span><span style="font-size:13px;font-family:宋體">、分布式反饋</span><span style="font-size:13px;font-family:Times">(DFB)</span><span style="font-size:13px;font-family: 宋體">和廣域激光二極管</span><span style="font-size:13px;font-family:Times">(BALDs)</span><span style="font-size:13px;font-family:宋體">等產(chǎn)品類(lèi)型。</span></p><p><span style="font-size:13px;font-family:宋體">在應用領(lǐng)域上，邊發(fā)射激光器傳統應用領(lǐng)域包括數據通信、光通信、</span><span style="font-size:13px;font-family:Times">3D</span><span style="font-size:13px;font-family:宋體">打印、材料加工、顯示與照明等，新興應用場(chǎng)景包括激光雷達、人臉</span><span style="font-size:13px;font-family:Times">/</span><span style="font-size:13px;font-family:宋體">手勢識別、醫療等。作為探測光源，邊緣發(fā)射激光器具有高可靠性、小型化、發(fā)光功率密度高等優(yōu)勢，在光通信、激光雷達、醫療等領(lǐng)域應用前景廣闊。但同時(shí)，邊緣發(fā)射激光器也存在一定不足，如工藝復雜繁瑣、難保障一致性、成本高等，未來(lái)邊緣發(fā)射激光器仍需在技術(shù)、工藝、性能等方面持續優(yōu)化。</span></p><p><span style="font-size:13px;font-family:宋體">由于邊發(fā)射激光器的出光在半導體激光芯片的側面邊緣，因此難以在很小的尺寸里對芯片做封裝，封裝形式包括</span><span style="font-size:13px;font-family:Times">TO</span><span style="font-size:13px;font-family:宋體">、蝶形、</span><span style="font-size:13px;font-family:Times">C</span><span style="font-size:13px;font-family:宋體">型</span><span style="font-size:13px;font-family:Times">(C-mount)</span><span style="font-size:13px;font-family: 宋體">、</span><span style="font-size:13px;font-family:Times">D</span><span style="font-size:13px;font-family:宋體">型</span><span style="font-size:13px;font-family:Times">(D-mount)</span><span style="font-size:13px;font-family: 宋體">等。目前大多數有封裝的邊發(fā)射激光器采用的是</span><span style="font-size:13px;font-family:Times">to-can</span><span style="font-size:13px;font-family: 宋體">封裝、蝶形封裝的形式。</span></p><p><span style="font-size:13px;font-family:宋體">二、激光器產(chǎn)業(yè)鏈</span></p><p><span style="font-size:13px;font-family:宋體">激光器行業(yè)產(chǎn)業(yè)鏈上游包括芯片、泵浦管、耦合器等零部件生產(chǎn)環(huán)節；中游為激光器生產(chǎn)供應環(huán)節，主要包括氣體激光器、光纖激光器和半導體激光器、固體激光器與染料（液體）激光器；下游廣泛應用于機械、冶金、電子、汽車(chē)、航空、軍工等領(lǐng)域。</span><span style="font-size: 11px;font-family:宋體">）</span></p><p><span style="font-size:13px;font-family:Times">Vcsel</span></p><p><span style="font-size:13px;font-family:Times">VCSEL</span><span style="font-size:13px;font-family: 宋體">國外廠(chǎng)商主要有</span><span style="font-size:13px;font-family:Times">Lumentum</span><span style="font-size:13px;font-family:宋體">、</span><span style="font-size:13px;font-family:Times">Finisar</span><span style="font-size:13px;font-family: 宋體">（被</span><span style="font-size:13px;font-family:Times">II-VI</span><span style="font-size:13px;font-family:宋體">收購）、</span><span style="font-size:13px;font-family:Times">II-VI</span><span style="font-size:13px;font-family: 宋體">（改名</span><span style="font-size:13px;font-family:Times">Coherent</span><span style="font-size:13px;font-family:宋體">）、</span><span style="font-size:13px;font-family:Times">Broadcom</span><span style="font-size:13px;font-family: 宋體">、</span><span style="font-size:13px;font-family:Times">Trumpf</span><span style="font-size:13px;font-family:宋體">、</span><span style="font-size:13px;font-family:Times">ams</span><span style="font-size:13px;font-family:宋體">等。國內主要有三江蘇華興、武漢光迅科技、深圳源國、度亙激光、華工正源等公司。</span><span style="font-size:13px;font-family:Times">VCSEL</span><span style="font-size:13px;font-family: 宋體">企業(yè)基本都來(lái)自于光通信芯片的龍頭企業(yè)；也正是</span><span style="font-size:13px;font-family:Times">VCSEL</span><span style="font-size:13px;font-family: 宋體">有了在光通信領(lǐng)域的經(jīng)驗，消費級應用也更快滲透，兩者產(chǎn)品具備很強的技術(shù)延展性。</span></p><p><span style="font-size:13px;font-family:Times">EEL</span></p><p style="margin-bottom: 0px"><span style="font-size:13px;font-family:Times">EEL</span><span style="font-size:13px;font-family:宋體">市場(chǎng)是高度分散的。大多數</span><span style="font-size: 13px;font-family:Times">EEL</span><span style="font-size:13px;font-family:宋體">制造商都是垂直整合的，即在內部進(jìn)行外延、前端線(xiàn)尾</span><span style="font-size:13px;font-family:Times">(FEOL)</span><span style="font-size:13px;font-family:宋體">處理、包括與激光二極管組件的圖樣相關(guān)所有制程步驟，以及后端線(xiàn)尾</span><span style="font-size:13px;font-family:Times">(BEOL)</span><span style="font-size:13px;font-family: 宋體">制程，包括互連和封裝。邊發(fā)射激光器供應商有艾邁斯歐司朗、</span><span 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